Aim & Scope
Journal of Micromechanics and Microengineering covers all aspects of microelectromechanical structures, devices and systems, as well as micromechanics and micromechatronics. The journal aims to highlight the link between fabrication technologies and their capacity to create novel devices. The journal focuses on fundamental work in fabrication and process technologies, including bulk and surface micromachining, LIGA, EDM, bonding, lithography, and focussed ion beam techniques. New aspects of production techniques to create micromechanical systems and reliability aspects are reported. Applications of these techniques in sensor and actuator areas are covered. Typical devices include accelerometers, displays, resonators, micromotors, microvalves and pumps, micropositioners, microrobots, micro-optical systems and MEMS for RF applications. Methods to improve the achievable results are reported, such as CAD and modelling tools to predict the performance of micromechanical systems, and metrology to evaluate their performance. The journal also covers interface electronics and integration and vacuum microelectronics. [1]
2024
Recent progress in 2D textile-based piezoresistive strain and pressure sensors
Journal of Micromechanics and Microengineering (JMM) , 2024
A Farag , A Fath El-Bab , M Yoshino , ... , M Hassan
Journal of Micromechanics and Microengineering (JMM) , 2024
The UmboMic: A PVDF Cantilever Microphone
A Yeiser , E Wawrzynek , J Zhang , ... , H Nakajima
Journal of Micromechanics and Microengineering (JMM) , 2024
Morphology of films deposited on the sidewall during the Bosch process using C4F8 plasmas
T Nonaka , K Takahashi , A Uchida , O Tsuji
Journal of Micromechanics and Microengineering (JMM) , 2024
A Review of Research on RF MEMS for Metaverse Interactions
X Nan , Q Jia , F Lv , ... , L Gao
Journal of Micromechanics and Microengineering (JMM) , 2024
Equivalent Electrical Circuits for Electroacoustic MEMS Design: A Review
Journal of Micromechanics and Microengineering (JMM) , 2024
Microfluidic biosensors: exploring various applications through diverse bonding methods
Journal of Micromechanics and Microengineering (JMM) , 2024
K Gangwar , K Pandiyan , P I A
Journal of Micromechanics and Microengineering (JMM) , 2024
S Li , Y Zhao , Z Wu , ... , C Luo
Journal of Micromechanics and Microengineering (JMM) , 2024
M Tasneem , F Aljahwari , M Al-Kindi , ... , I Al-Lawati
Journal of Micromechanics and Microengineering (JMM) , 2024
